Focused particle beam-induced processing

Focused particle beam-induced processing

In light of the success of 3D printing using fused-deposition modeling or higher-resolution variants with lasers applicable to polymers and metals, one may wonder whether an analogous approach exists on the nanometer scale. Indeed it does. With the aid of focused particle beam-induced deposition (FPBID) it is possible to create solid-state structures on the nanoscale. However, in contrast with ...

Continuum models of focused electron beam induced processing

Focused electron beam induced processing (FEBIP) is a suite of direct-write, high resolution techniques that enable fabrication and editing of nanostructured materials inside scanning electron microscopes and other focused electron beam (FEB) systems. Here we detail continuum techniques that are used to model FEBIP, and release software that can be used to simulate a wide range of processes rep...

Focused electron beam induced deposition: A perspective

BACKGROUND Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface is dissociated in the focus of an electron beam. After 20 years of continuous development FEBID has reached a stage at which this technique is ...

Characterization of Diamond-Like Film after Focused Ion Beam Processing

Optical properties (transmission and refractive index) and chemical structure (XPS) of diamond-like coating (DLC) film before and after focused ion beam milling (FIBM) process, were investigated in this paper. It is shown by our FIBM experiment that influence of FIBM on Optical properties and chemical structure of the DLC film is not apparent, especially in near-infra region. The film still ca...

Focused Ion Beam Lithography